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发明名称
MANUFACTURE OF SEMICONDUCTOR ELEMENT
摘要
申请公布号
JPH05190451(A)
申请公布日期
1993.07.30
申请号
JP19920023341
申请日期
1992.01.14
申请人
FUJI XEROX CO LTD
发明人
ASAI ICHIRO;FUSE MARIO
分类号
H01L21/20;H01L21/268;H01L21/336;H01L29/78;H01L29/786
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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