| 摘要 |
PURPOSE:To prevent inert gas from flowing out by a solenoid valve when a wire bonder is not in operation. CONSTITUTION:When a wire bonder 1 is made to start operating or stopped, a signal detecting section 4 detects signals which indicate that the wire bonder 1 is in operation or not. A drive section 2 sends drive signals basing on the detection signals transmitted from the detection section 4 to open or close a solenoid valve 3, whereby inert gas is made to flow out or stopped. |
