| 摘要 |
<p>PURPOSE: To eliminate concurrent deposition to form a cone-like electric field emitter, and substitute the concurrent deposition with continuous deposition, by arranging a stack composed of insulating and conductive layers onto a conductive layer, and providing an opening on the stack. CONSTITUTION: A stack 15 is constituted including two insulating layers 18 and 22 separated into tow electro conductive layers 18 and 22 arranged onto a conductive layer 14, and a cone type electric field emitter 30 is connected to a terminal 42 via the layer 14. The layer 18 has a peripheral part arranged in an opening 15' adjoining a chip 30', and the such edge part of the layer 18 provides an electric field between the edge part of the layer 18 and the chip 30' to take out an electron from the chip 30' of the emitter 30. That is, applying an electric potential V1 between the terminal 42 and a terminal 44 can take out the electron by emitting the electric field from the chip 30', and the edge part of the conductive layer 22, exposed by the opening 15', functions as a focusing electrode to an emitted electron beam. This can eliminate concurrent deposition to form the emitter 30, also substitute the concurrent deposition with continuous deposition.</p> |
