| 摘要 |
PURPOSE: To improve resolution strength by means of a simple device by providing a pair of polarizing plates by which light is polarized in different directions and providing a mask between a condensing lens and a reduced projection lens. CONSTITUTION: Light from a light source 1 is polarized by one of the pair of polarizing plates 6a and 6b. When light passes through the polarizing plate 6a, for example, light emitted from the light source 1 is polarized by the polarizing plate 6a and the polarized light is converged by the condensing lens 2 and, after that, irradiated on a polarization mask 3. At this time, the polarization mask 3 is irradiated with light, light passes through a pattern 3a but does not pass through the pattern 3b so that the pattern a is formed in a wafer 5 with the reduced projection lens 4. In a same way, polarized light which passes through the polarizing plate 5a passes through only the pattern 3b of the polarization mask 3 so that the pattern 3b is formed in the wafer 5. |
