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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH05190535(A)
申请公布日期
1993.07.30
申请号
JP19920001808
申请日期
1992.01.09
申请人
FUJI ELECTRIC CO LTD
发明人
SAKAI TAKAO
分类号
H01L21/26;H01L21/28;H01L21/283;H01L21/316
主分类号
H01L21/26
代理机构
代理人
主权项
地址
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