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发明名称
VERFAHREN UND EINRICHTUNG ZUM AUTOMATISCHEN LESEN VON VERNIER-MUSTERN.
摘要
申请公布号
DE3785430(T2)
申请公布日期
1993.07.29
申请号
DE19873785430T
申请日期
1987.12.11
申请人
AMERICAN TELEPHONE AND TELEGRAPH CO., NEW YORK, N.Y., US
发明人
KUYEL, BIROL, PENNINGTON NEW JERSEY 08534, US
分类号
G05D3/12;G01B11/00;G03F7/20;H01L21/027;H01L21/30;H01L21/68;(IPC1-7):G03F7/20
主分类号
G05D3/12
代理机构
代理人
主权项
地址
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