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发明名称
NICHTFLUECHTIGE HALBLEITERSPEICHERANORDNUNG UND VERFAHREN ZU IHRER HERSTELLUNG.
摘要
申请公布号
DE3881986(D1)
申请公布日期
1993.07.29
申请号
DE19883881986
申请日期
1988.08.24
申请人
KABUSHIKI KAISHA TOSHIBA, KAWASAKI, KANAGAWA, JP
发明人
YOSHIKAWA, KUNIYOSHI PATENT DIVISION K.K. TOSHIBA, TOKYO 105, JP
分类号
H01L21/28;H01L21/336;H01L21/8247;H01L27/115;H01L29/788;H01L29/792;(IPC1-7):H01L29/78;G11C17/00;H01L21/335
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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