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发明名称
METHOD AND APPARATUS FOR DETECTING A CRYSTALLOGRAPHIC AXIS OF A SINGLE CRYSTAL INGOT FOR OF DETERMINATION
摘要
申请公布号
EP0500339(A3)
申请公布日期
1993.07.28
申请号
EP19920301356
申请日期
1992.02.19
申请人
SHIN-ETSU HANDOTAI COMPANY, LIMITED
发明人
IBE, HIROYUKI;TERASHIMA, SEIICHI;MASUI, TSUMORU
分类号
G01N23/20;G01N23/207;(IPC1-7):G01N23/207
主分类号
G01N23/20
代理机构
代理人
主权项
地址
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