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发明名称
ELECTRIC ARC EVAPORATOR
摘要
申请公布号
EP0548032(A3)
申请公布日期
1993.07.28
申请号
EP19920830665
申请日期
1992.12.10
申请人
UNICOAT S.R.L.
发明人
BELLETTI, MANUELA
分类号
C23C14/24;C23C14/32;H01J37/32;(IPC1-7):H01J37/32
主分类号
C23C14/24
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