| 摘要 |
PURPOSE:To detect abnormality at high speed on the generation of the displacement of an optical axis by mounting a detector, to which a wire prescribing the range of passage of beams is fitted, into a transmission path for laser beams and detecting the displacement of beams from the change of electric resistance on the displacement of beams. CONSTITUTION:Four wires 3 are connected mutually in series, and connected to a power supply 4 through an external resistor 5. When laser beams generate the displacement of an optical axis and are brought to the state of 1b, the resistance values of the wires 3 change, voltage at both ends of the wires varies, and the voltage signals are inputted to a comparator 7 through an amplifier 6, and compared with the voltage of a reference voltage source 8. When a difference between both reaches a previously set value or more, the comparator 7 transmits an alarm signal over a controller 9, and laser oscillation is stopped. Accordingly, the small-gate wires are fitted around an optical path, thus obstructing no passage of beams on normality, then detecting abnormality at high speed on the generation of the displacement of beams. |
