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发明名称
IONIZATION GAUGE AND METHOD OF USING AND CALIBRATING SAME
摘要
申请公布号
EP0537770(A3)
申请公布日期
1993.07.28
申请号
EP19920117733
申请日期
1992.10.16
申请人
GRANVILLE-PHILLIPS COMPANY
发明人
BILLS, DANIEL GRANVILLE;BORENSTEIN, MICHAEL DALE;ARNOLD, PAUL CLARKE
分类号
G01L21/30;G01L21/32;G01L27/00;H01J41/04;(IPC1-7):H01J41/04
主分类号
G01L21/30
代理机构
代理人
主权项
地址
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