| 摘要 |
PURPOSE:To prevent the thermal deformation of a sample even if an electron beam is stopped to some degree and the data collection is repeated by providing a measurement time interval between a data collection point and the data collection point adjacent to it. CONSTITUTION:After the measurement of a frame is completed, the measurement of the next frame is started, this time the measurement is continued at the collection point (b) one pitch apart for A1, A2, A3 lines. After the measurement at the data collection point (b) is completed, the measurement at the data collection point (c) is likewise started. In the fourth frame scanning after these three scannings, the measurement is performed at data collection points a1, a2, a3 for B1, B2, B3 lines, and subsequently the measurement is thus performed at all data collection points. Next, the data thus obtained are processed to be aligned in the order of the data collection points. Accordingly, the measurement time interval between adjacent data collection points can be set sufficiently, and the effect of the heating of a sample can be prevented. |
