发明名称 |
Diamond films. |
摘要 |
<p>This invention relates to an apparatus (4) and method for making large area diamond films using a high temperature plasma reactor with a plasma reactor stream flow controller (18) constructed of a non-carbonaceous refractive metal such as tungsten or rhenium where hydrocarbon injection is used. Such structures of this type generally allow large area diamond films to be created on a substrate in an efficient, cost-effective manner. <IMAGE></p> |
申请公布号 |
EP0552547(A1) |
申请公布日期 |
1993.07.28 |
申请号 |
EP19920311298 |
申请日期 |
1992.12.10 |
申请人 |
GENERAL ELECTRIC COMPANY |
发明人 |
SAVKAR, SUDHIR DATTATRAYA;MILLER, RUSSELL SCOTT |
分类号 |
C30B25/02;C23C16/27;C23C16/513;C30B25/08;C30B25/16;C30B29/04;H01J37/32 |
主分类号 |
C30B25/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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