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发明名称
PRODUCTION OF ALUMINIUM NITRIDE POWDER BY CARBOREDUCTIVE NITRIDATION
摘要
申请公布号
EP0372691(B1)
申请公布日期
1993.07.28
申请号
EP19890310205
申请日期
1989.10.05
申请人
SUMITOMO CHEMICAL COMPANY, LIMITED
发明人
NAKANO, KAZUHIKO;MURASE, MITSUTOSHI;MATSUDA, NORIO;MURAKAMI, HIDEAKI
分类号
C01B21/072;H01L21/48
主分类号
C01B21/072
代理机构
代理人
主权项
地址
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