METHOD AND APPARATUS FOR POTENTIAL MEASUREMENT ON CONDUCTIVE TRACKS OF A PROGRAM-CONTROLLED INTEGRATED CIRCUIT

摘要

A method and an apparatus for the potential measurement on conductive tracks of a program-controlled integrated circuit. The integrated circuit is scanned by an electron beam in one single scan line crossing at least one conductive track during a specific time range of the program. In an initial auxiliary measurement, the spatial displacement of a logic image caused by electrical and/or magnetic disturbances is determined over time and stored. A principal measurement then takes place during the same time range of the program as the auxiliary measurement. In the principal measurement, an electron beam is directed statically onto the conductive track to be measured and the time dependence of the spatial displacement determined by the auxiliary measurement is used as a compensation value for correcting deflections of the electron beam caused by electrical and/or magnetic disturbances.