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经营范围
发明名称
SPIN COATER
摘要
申请公布号
JPH05185014(A)
申请公布日期
1993.07.27
申请号
JP19920001543
申请日期
1992.01.08
申请人
DAINIPPON INK & CHEM INC;NKK CORP
发明人
MIYASHITA HIDEO;TSUKADA MASAKAZU
分类号
B05C11/08;G03F7/16;H01L21/027
主分类号
B05C11/08
代理机构
代理人
主权项
地址
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