APPARATUS AND METHOD FOR ACOUSTIC MICROSCOPE

摘要

PURPOSE: To accurately measure a phase with increased lateral resolution and to extend the function of a near field acoustic microscope by applying an exciting signal to a piezoelectric thin film on the upper surface of a cantilever arm and generating a frequency acoustic signal. CONSTITUTION: A sharp tip probe 14 is provided on the lower surface of a cantilever arm 102, and a ZnO piezoelectric thin film transducer 210 is provided on the part of the upper surface. A VHF-RF exciting signal 212 excites the transducer 210 by the exciting frequency having a predetermined selected frequency. A detector 214 measures the amplitude and/or phase of te acoustic wave reflected from a sample 110, and a detector 222 measures the amplitude and/or phase of the acoustic wave transmitted via the sample 110. In addition, there is a method of the combination of an atomic pressure measurement and/or tunnel current measurement and acoustic measurement to characterize the operation by the pulse and target object.