| 摘要 |
<p>PURPOSE:To enhance the accuracy in feeding a traveling stage moving in the vertical direction by giving a preload to a ball slide bearing. CONSTITUTION:Through a ball slide bearing 3a a slide member 2 is supported on a mounting frame 4 where a micrometer head 7 is installed on the base end side while an upright side-wall 5 is provided on the foremost side. On the slide member 2 a traveling stage 1 is supported through ball slide bearing 3a installed aslant. On the traveling stage 1 a guide roller 6 contacting a side-wall 5 is supported rotatably. A spring 11 is set between the frame 4 and stage 1 to give a preload always to the ball slide bearing 3a.</p> |
