LASER BEAM MACHINE

摘要

PURPOSE:To remove a processing defect or a fluctuation in processing shapes by changing the polarization state of a laser beam according to work pieces. CONSTITUTION:The laser beam LB 1 for processing of the linearly polarized light emitted from a laser beam source 5 is converted to the laser beam LB 2 for processing by a beam expander 6. A dichroic mirror 7 is irradiated with this laser beam. The laser beam LB 2 for processing reflected by the dichroic mirror 7 is made incident on an objective lens 8 via a through-hole wavelength plate in a polarized light variable plate 12. The polarization state of the laser beam LB 2 for processing is variously changed by the polarized light varying plate 12. The laser beam LB 2 for processing changed in the polarization state is focused onto the processing point of the work piece 2 on an X-Y stage 1.