| 摘要 |
PURPOSE:To obtain fine powdery silicon carbide of improved quality by pyrolytic reaction of Si with an organosilicon polymer made up of oligomer of a specific formula in an atmosphere of hot plasma state. CONSTITUTION:A mixed stock 2 prepared by mixing Si powder of a specified particle diameter with an organosilicon polymer made up of oligomer of the formula at an appropriate weight ratio is fed into a high-frequency plasma furnace 10 where hot plasma of 4000 to 10000 deg.C or so has been generated by inputting current into a high-frequency coil 12 wound on a reactional torch 11. Then, a mixed gas comprising Ar gas from a tank 3 and H2 gas from a tank 4, as sheathing gas/actuating gas, is fed from above to the torch 11. When the mixed stock 2 passes through the hot plasma atmosphere in the reaction vessel 13, the organosilicon polymer and Si powder are put to pyrolytic reaction and SiC is formed instantaneously. The fine powdery SiC 20 produced is collected by a cyclone 6 followed by collecting even finer powdery SiC 21 using a filter 7, thus obtaining the objective silicon carbide, i.e., both of the SiC 20 and SiC 21. |
