APPARATUS FOR PRODUCING GLASS THIN FILM

摘要

PURPOSE:To reduce the inhomogeneity caused in forming many porous glass films. CONSTITUTION:A cylindrical holder 14 housed in a reactional vessel 12 is rotated sound the shaft 24 relatively to the reactional vessel 12 and reciprocated in the direction of the shaft 24. Plural substrates 16 are supported on the side of this cylindrical holder 14. A burner 20 fixed on the side of the reactional vessel 12 is capable of feeding a raw material together with an oxyhydrogen flame onto the substrates 16 on the side of the cylindrical holder 14 to form glass fine particulate layers on the surfaces of the substrates. A heater member 26 housed in the inner space of the cylindrical holder 14 is capable of uniformly heating the plural substrates 16 while rotating relatively to the cylindrical holder 14 round the shaft 28 as the center. Thereby, the temperatures of the respective substrates can be kept constant and the glass fine particulate layers deposited on the respective substrates 16 can be homogenized and regulated to a constant thickness. The substrates 16 are then heated to a high temperature in a furnace and the deposited glass fine particulate layers are transparentized to provide oxide glass thin films.