| 摘要 |
PURPOSE:To obtain a fiber-reinforced composite material having high density in a short time by the chemical vapor deposition process to deposit a matrix material on reinforcing fibers in a reaction vessel by repeating the increase and decrease of the pressure in the reaction vessel containing raw material gas introduced into the vessel. CONSTITUTION:A woven fabric, etc., of reinforcing fiber used as a processing object 7 is set on a specimen table 5 in a reaction vessel 2, the reaction vessel is closed and electromagnetic valves 24, 28 connected to vacuum pumps 26, 29 are opened to evacuate the reaction vessel to <=10<-1>Torr. The processing object 7 is heated with a heater 3 and a raw material gas is introduced from a gas cylinder 8 into the vessel 2 to keep the concentration of the gas to a prescribed level. The raw material gas or a gaseous mixture of the raw material gas and a diluting gas in a bomb 9 is introduced into the vessel 2 through a nozzle 19 to increase the pressure in the vessel above the atmospheric pressure. Carbide or nitride, etc., are formed and deposited in the pore and on the surface of the processing object 7 by this procedure. Thereafter, electromagnetic valves 14, 15 are closed and electromagnetic valves 22, 24, 28 are opened to evacuate the vessel 2 to a prescribed pressure and, thereafter, the vessel is pressurized. The above procedures are repeated to obtain the objective composite material. |
