发明名称 SWITCHABLE RESONANT FILTER FOR OPTICAL RADIATION
摘要 A structure and its method for manufacture for a switchable optical filter. The structure comprises a substrate (10) transparent to the radiation of interest, which contains or supports an electrode (12). A spacer layer (16) suspends the membrane over the electrode (12) such that no spacer lies between the electrode (12) and the membrane (22), yet some spacer (16) remains elsewhere to support the membrane (22). The membrane has slots (24) in it which are of a specified length in order to resonate at a particular wavelength of radiation. When the electrode (12) is activated, the membrane (22) deflects and its varying proximity to the substrate changes the wavelength of transmission. <IMAGE>
申请公布号 US5231532(A) 申请公布日期 1993.07.27
申请号 US19920831719 申请日期 1992.02.05
申请人 TEXAS INSTRUMENTS INCORPORATED 发明人 MAGEL, GREGORY A.;ZIMMERMAN, JON C.
分类号 G01J1/02;G01J1/04;G02B5/20;G02B5/28;G02B26/00;H01Q15/00 主分类号 G01J1/02
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