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发明名称
PROCESS FOR FORMING CVD FILM AND SEMICONDUCTOR DEVICE
摘要
申请公布号
US5231058(A)
申请公布日期
1993.07.27
申请号
US19900628237
申请日期
1990.12.14
申请人
SEMICONDUCTOR PROCESS LABORATORY CO. LTD.
发明人
MAEDA, KAZUO;TOKUMASU, NOBORU;NISHIMOTO, YUKO
分类号
C23C16/40;H01L21/316
主分类号
C23C16/40
代理机构
代理人
主权项
地址
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