HIGH SPEED ATOMIC BEAM SOURCE,申请号JP19920018575-传众专利搜索

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发明名称	HIGH SPEED ATOMIC BEAM SOURCE
摘要
申请公布号	JPH05182787(A)	申请公布日期	1993.07.23
申请号	JP19920018575	申请日期	1992.01.07
申请人	EBARA CORP	发明人	HATAKEYAMA MASAKI
分类号	H05H3/02;G21K5/04	主分类号	H05H3/02
代理机构		代理人
主权项
地址

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