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发明名称
METHOD FOR CALCULATING WIRING CAPACITY OF SEMICONDUCTOR INTEGRATED CIRCUIT
摘要
申请公布号
JPH05181926(A)
申请公布日期
1993.07.23
申请号
JP19910345713
申请日期
1991.12.27
申请人
FUJITSU LTD
发明人
MISHIMA CHIKAKO
分类号
H01L21/82;G06F17/50
主分类号
H01L21/82
代理机构
代理人
主权项
地址
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