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发明名称
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURE THAT
摘要
申请公布号
JPH05182958(A)
申请公布日期
1993.07.23
申请号
JP19910050107
申请日期
1991.02.25
申请人
NIKON CORP
发明人
SHODA MASAHIRO
分类号
H01L21/76;H01L21/316
主分类号
H01L21/76
代理机构
代理人
主权项
地址
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