| 摘要 |
PURPOSE:To arrange a depth-wise element concentration distribution measuring apparatus and method to enable the measuring of a depth-wise concentration distribution of elements accurately and automatically from high down to micro scopic concentration. CONSTITUTION:A depth-wise element concentration distribution measuring apparatus 10 contains a secondary ion detection system 11 and an Auger electron detection system 12. It further contains a detection system switch controller 13 which switches the secondary ion detection system 11 and the Auger electron detection system 12 according to a secondary ion signal intensity SS being sent from the secondary ion detection system 11 and an Auger electron signal intensity SA, being sent from the Auger electron detection system 12 to determine the concentration of an element and an output device 14 which outputs a depth-wise element concentration distribution from the concentration of the element being sent from the detection system switch controller 13. |
