ION-MILLING DEVICE,申请号JP19910360587-传众专利搜索

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发明名称	ION-MILLING DEVICE
摘要
申请公布号	JPH05182931(A)	申请公布日期	1993.07.23
申请号	JP19910360587	申请日期	1991.12.28
申请人	NEC CORP	发明人	HINO YASUHIKO
分类号	C23F4/00;H01L21/302	主分类号	C23F4/00
代理机构		代理人
主权项
地址

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