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发明名称
VACUUM CHAMBER FOR APPLICATION OF FILMS
摘要
申请公布号
RU1828878(C)
申请公布日期
1993.07.23
申请号
SU19914944195
申请日期
1991.06.10
申请人
TSENTRALNYJ NAUCHNO-ISSLEDOVATELSKIJ TEKHNOLOGICHESKIJ INSTITUT
发明人
PASHCHENKO PAVEL V;BESOGONOV VALERIJ V;BELYANIN ALEKSEJ F;EFREMOV SERGEJ M
分类号
C23C14/56
主分类号
C23C14/56
代理机构
代理人
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地址
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