| 摘要 |
<p>PURPOSE:To provide an apparatus for discriminating good and no good conditions of chips and simultaneously arranging the chips, moreover picking up chips and simultaneously checking again the good and no good conditions of chips by comprising particular a semiconductor wafer loading tray, a chip arranging device, an optical detecting device and a collet. CONSTITUTION:This chip automatic selection and transfer apparatus comprises a semiconductor wafer loading tray 21 for loading diced semiconductor wafer 1 to move in the X-Y directions and a chip arranging device 22 for arranging good chips 1d transferred from the loading tray 21 while these are moved in the X-Y directions. Moreover, at least an optical detecting device 23 is also provided in the upper part of the chips 1d to be transferred in order to discriminate the good or no good condition of the chips 1d by detecting the marks applied on the chips 1d. In addition, at least three sets of collet 24 are provided in such a manner as being arranged with the equal interval on the same circumference around the rotating axis and moved in the axial direction of the rotating axis to receive the good chips 1d from the loading tray 21 and transfer the chips 1d to the chip arranging device 22.</p> |
