VERFAHREN ZUR HERSTELLUNG EINES FILMS AUS ULTRAFEINEN TEILCHEN.,申请号DE19873785295T-传众专利搜索

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发明名称	VERFAHREN ZUR HERSTELLUNG EINES FILMS AUS ULTRAFEINEN TEILCHEN.
摘要
申请公布号	DE3785295(T2)	申请公布日期	1993.07.22
申请号	DE19873785295T	申请日期	1987.10.26
申请人	HITACHI, LTD., TOKIO/TOKYO, JP	发明人	ARAYA, TAKESHI, HIGASHIKURUME-SHI, JP;MATSUNAWA, AKIRA, NISHINOMIYA-SHI, JP;KATAYAMA, SEIJI, SUITA-SHI, JP;HIOKI, SUSUMU, KASHIWA-SHI, JP;HANEDA, MITSUAKI, NISHIIBARAKI-GUN IBARAKI-KEN, JP;OKADA, RYOJI TSUKUBA HAUSU 1-305, NIIHARI-GUN IBARAKI-KEN, JP
分类号	C23C14/24;C23C14/28;H01L39/24;(IPC1-7):C23C14/28;B22F9/04	主分类号	C23C14/24
代理机构		代理人
主权项
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