发明名称 Semiconductor device of DRAM structure - comprising substrate, impurity regions formed on substrate, and conducting layers
摘要 Semiconductor device (I) comprises: (a) a substrate (1) of a 1st conducting type; (b) a 1st and 2nd impurity region (3a, 3b) of a 2nd conducting type formed on the main surface of the substrate on opposite lying sides of an intermediate channel region (16); (c) 3rd impurity region (4) of a 2nd conducting type formed in the 1st impurity region, a gate electrode (6) formed on the channel region with a gate insulating film (5), a 1st conducting layer (8) formed on the 1st and 3rd impurity regions; and (d) a 2nd conducting layer (9) formed on the 1st conducting layer and havng pre-determined impurity regions, where the impurity concn. of the 1st conducting layer is lower than that of the 2nd conducting layer. USE/ADVANTAGE - (I) is a structure of a DRAM.
申请公布号 DE4300357(A1) 申请公布日期 1993.07.22
申请号 DE19934300357 申请日期 1993.01.08
申请人 MITSUBISHI DENKI K.K., TOKIO/TOKYO, JP 发明人 KATAYAMA, TOSHIHARU, ITAMI, HYOGO, JP
分类号 H01L27/108 主分类号 H01L27/108
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