摘要 |
PURPOSE:To improve the SN ratio of the transmission type near field scanning type microscope by removing the influence of scattered light from a sample surface. CONSTITUTION:The transmission type near field scanning type microscope is equipped with a light irradiating means 5 which irradiates an observation point of a sample 1 mounted on a sample base with illumination light from the reverse surface through the sample base and a probe means 7 which can scan the sample 1 relatively, and an optical waveguide which has optical waveguide parts of two series is used as the probe means 7; and the distances between the tip parts of the optical waveguide parts of the two series and the sample surface are made different from each other and an observation output is obtained according to the difference in light intensities detected from the optical waveguide parts of the two series. |