HOCHFREQUENZ-IONENQUELLE.

摘要

A high-frequency ion source uses a tubular plasma vessel of a shape to suit the desired ion beam which is clamped between a carrier plate and a cover plate. An electron cyclotron wave resonance can achieve a plasma excitation at low gas pressure. A tunable intermediate circuit is fitted between H.F. generator and load circuit coil. A stationary magnetic field is produced by a pair of HELMHOLTZ coils with a geometry to match the shape of the plasma vessel. The carrier plate has a system of electrodes for the ion extraction, consisting of ion optics to suit the desired geometry of the ion beam.