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发明名称
PLASMA TREATMENT APPARATUS
摘要
申请公布号
JPH0684836(A)
申请公布日期
1994.03.25
申请号
JP19920236833
申请日期
1992.09.04
申请人
HITACHI LTD
发明人
WATANABE SEIICHI;FURUSE MUNEO
分类号
H01L21/205;H01L21/302;H01L21/3065;(IPC1-7):H01L21/302
主分类号
H01L21/205
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代理人
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