COATING SOLUTION FOR FORMING SILICA COATING FILM,申请号JP19910344975-传众专利搜索

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发明名称	COATING SOLUTION FOR FORMING SILICA COATING FILM
摘要
申请公布号	JPH05179202(A)	申请公布日期	1993.07.20
申请号	JP19910344975	申请日期	1991.12.26
申请人	SUMITOMO CHEM CO LTD	发明人	TAKASHIMA MASAYUKI;NAKADA TAKASHI;TAGUCHI SATOSHI
分类号	C09D183/04;H01L21/312	主分类号	C09D183/04
代理机构		代理人
主权项
地址

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