发明名称 (A) ;REMOVAL OF SPONTANEOUS OXIDE FILM IN CONTACT HOLE ON SILICON WAFER
摘要 PURPOSE:To prevent the turbulence of oil flow so as to obtain an proper pressure, by having a portion submerged in the oil of a pitot tube formed into an ellipse an allowing the ellipse to be place along the direction of oil flow. CONSTITUTION:A pitot tube 55, being so constituted that the lower half portion of a ture circular portion 55b submerged in oil is an elliptical portion 55c formed in an elliptical shape has a large elliptical opening 55d cut out diagonally at the tip end thereof and slanting by a given angle alpha against its axis. Also, the sectional part 55e of the opening 55d does not form a flat surface, but a streamlined surface. Said tube 55 is installed in such a way that the opening 55d may face the upstream of oil flow, with the major axis of an elliptical portion 55c placed along the oil flow. Hence, oil will flow along a streamline in nearly laminar flow state without turbulence even under a high speed condition, thereby giving rise to a stable and proper development of the pitot pressure.
申请公布号 JPH0547742(B2) 申请公布日期 1993.07.19
申请号 JP19860300635 申请日期 1986.12.17
申请人 FUJI JUKOGYO KK;BAN DOORUNEZU TORANZUMITSUSHII BV 发明人 TAKAHASHI MASAHIKO
分类号 F16H9/00;F16H59/00;F16H61/00;(IPC1-7):F16H61/00 主分类号 F16H9/00
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