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发明名称
PREPARING SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH07130723(A)
申请公布日期
1995.05.19
申请号
JP19930271845
申请日期
1993.10.29
申请人
TOSHIBA CORP
发明人
SHIMADA SHINICHI
分类号
H01L21/316;H01L21/76;(IPC1-7):H01L21/316
主分类号
H01L21/316
代理机构
代理人
主权项
地址
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