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发明名称
METHOD FOR SEPARATING SEMICONDUCTOR PLATES INTO CRYSTALS
摘要
申请公布号
RU1827696(C)
申请公布日期
1993.07.15
申请号
SU19914928500
申请日期
1991.04.18
申请人
LENINGRADSKOE NAUCHNO-PROIZVODSTVENNOE OB"EDINENIE "KRASNAYA ZARYA"
发明人
BEKKER YAKOV M;BAJKULOV KHALIS KH;VOLKOVA REGINA YA;PRIKHODKO PAVEL S;SHLYKOV VALERIJ V
分类号
H01L21/78
主分类号
H01L21/78
代理机构
代理人
主权项
地址
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