发明名称 DRAHTVERBINDUNGSVORRICHTUNG.
摘要 A wire bonding device including a camera (41) for producing image signals corresponding to a field of view including an object having plural target patterns on which wire bonding is to be performed, a displacement device (42, 43) for altering the field view of the camera (41) by varying the relative positioning between the camera (41) and the object, a monitor (47) for displaying an image of the object to be wire bonded, a reference mark display generation circuit (44) coupled to the camera (41) and the monitor (47) for combining reference mark signals with the image signals so that an image of a reference mark is superimposed on the imge of each target displayed by said monitor (47), a reference mark generation circuit (46) for storing data corresponding to plural reference marks and for producing reference mark signals definig a selected reference mark and applying the reference mark signals to the reference mark display generation circuit (44), and an input selection and control device (45) coupled to the reference mark generation circuit (46) for selecting a reference mark shape and size tailored to each target pattern and for producing corresponding selection signals applied to the reference mark generation circuit (46), which then produces the reference mark signals in correspondance with the selection signals.
申请公布号 DE3785129(T2) 申请公布日期 1993.07.15
申请号 DE19873785129T 申请日期 1987.08.14
申请人 KABUSHIKI KAISHA TOSHIBA, KAWASAKI, KANAGAWA, JP 发明人 YAMANAKA, KAZUYUKI, MINATO-KU TOKYO, JP
分类号 H01L21/60;H01L21/00 主分类号 H01L21/60
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