发明名称 SEMICONDUCTOR DEVICE SEALED UP WITH RESIN AND MANUFACTURE OF SAID DEVICE
摘要 PURPOSE:To make a coated film which is excellent in resistance to humidity and cracking, by coating a fluorine fluoroplastics resin on a semiconductor chip and packing them up with a thermosetting resin. CONSTITUTION:An ethylene fluoride resin is finely pulverized into a grain size of 50mum or less. An Si resin is prepared as a binder. Both the resins are mixed with an organic solvent so that the ratio of the former resin to the latter resin is 2:8-8:2. The mixture is dropped onto a chip already wired. The dropped mixture is baked on the chip at about 800 deg.C. The chip and the baked mixture are then entirely sealed up with a tehrmosetting Si resin. Since some of the finely pulverized fluorine resin contained in the mixture is partly melted by the heating at about 800 deg.C and bake- bonded by the binder, the chip and the coated film are bonded well to each other at a comparatively low temperature. The water repellency and softness of the bake- bonded film are maintained by the fluoroplastics contained in the film. Therefore, the film has high resistance to humidity and cracking and electric properties are not deteriorated.
申请公布号 JPS564256(A) 申请公布日期 1981.01.17
申请号 JP19790079202 申请日期 1979.06.25
申请人 HITACHI LTD 发明人 WAKASHIMA YOSHIAKI;TAUCHI SEIJI
分类号 H01L21/56;H01L23/29;H01L23/31 主分类号 H01L21/56
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