DEVICE FOR TREATING AND TRANSPORTING SEMICONDUCTOR SUBLAYERS,申请号SU19843684208-传众专利搜索

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发明名称	DEVICE FOR TREATING AND TRANSPORTING SEMICONDUCTOR SUBLAYERS
摘要
申请公布号	RU1190871(C)	申请公布日期	1993.07.15
申请号	SU19843684208	申请日期	1984.01.03
申请人	KRASNOZHON A.I.;SUKHORUKOV N.I.	发明人	KRASNOZHON A.I.;SUKHORUKOV N.I.
分类号	H01L21/68	主分类号	H01L21/68
代理机构		代理人
主权项
地址

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