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发明名称
VERFAHREN ZUR HERSTELLUNG VON WOLFRAM-ANTIMON OHMISCHEN KONTAKTEN MIT NIEDRIGEM WIDERSTAND AUF III-IV HALBLEITERMATERIALIEN.
摘要
申请公布号
DE69001016(T2)
申请公布日期
1993.07.15
申请号
DE1990601016T
申请日期
1990.12.07
申请人
AMERICAN TELEPHONE AND TELEGRAPH CO., NEW YORK, N.Y., US
发明人
DUTTA, RANJAN, LAWRENCEVILLE, NEW JERSEY 08540, US
分类号
H01L21/203;H01L21/28;H01L21/285;H01L29/45;(IPC1-7):H01L21/285
主分类号
H01L21/203
代理机构
代理人
主权项
地址
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