发明名称 Method of forming a bit line over capacitor array of memory cells and an array of bit line over capacitor array of memory cells
摘要 A semiconductor memory device includes, a) a semiconductor substrate; b) a field effect transistor gate positioned outwardly of the semiconductor substrate; c) opposing active areas formed within the semiconductor substrate on opposing sides of the gate; d) a capacitor electrically connected with one of the active areas; e) a bit line; f) a dielectric insulating layer positioned intermediate the bit line and the active areas; g) a bit line plug extending through the insulating layer and electrically interconnecting the bit line with the other active area, the bit line plug comprising an electrically conductive annular ring. Integrated circuitry, beyond memory devices, utilizing an annular interconnection ring are also disclosed. Such constructions having additional radially inward insulating annular rings and conductive rings are also disclosed. A method of forming a bit line over capacitor array of memory cells having such rings is also disclosed.
申请公布号 US5563089(A) 申请公布日期 1996.10.08
申请号 US19950394545 申请日期 1995.02.22
申请人 MICRON TECHNOLOGY, INC. 发明人 JOST, MARK;DENNISON, CHARLES H.;PAREKH, KUNAL
分类号 H01L21/02;H01L21/768;H01L21/8242;H01L23/485;H01L27/105;H01L27/108;(IPC1-7):H01L21/824 主分类号 H01L21/02
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