| 摘要 |
<p>The invention relates to a cryopump operating with a two-stage refrigerator (3), in which a plurality of rectangular plates (13, 14), which are arranged at a spacing parallel to one another and form the pumping surfaces (9) of the second stage (5); the plates (13, 14) extend essentially parallel to the plane of the baffle (7) and in the region of their longer sides have bent portions (18, 25) which extend away from the baffle (7); the shielded surfaces of the plates (13, 14), which extend parallel to the plane of the baffle (7), are coated at least partially with adsorption material (19); at least the surfaces of the bent portions (18, 25) that face the baffle (7) are constructed as condensation surfaces. …<IMAGE>… </p> |
