| 摘要 |
<p>PURPOSE:To reduce dust rising in a container and improve productive yield, by simplifying a lid opening mechanism, in which a cushion member is used for holding a substrate in a container, and a lock for fastening a lid and a lower tray can be unlatched in the same direction as the lid moves when it is opened. CONSTITUTION:When an upper-lid pushing member 23 is moved downward and the upper lid pushes a lower tray 1, a small space 26 almost equal to a space 25 is made between the lower tray 1 and a hooking member 3. Since the pushing strength from the upper-lid pushing member 23 is kept constant and an upper-lid holding member 22 is moved upward, the hooking member 3 begins getting in touch with a roller 22a and at the same time the hooking member 3 turns away from a catching member 1d around a rotating center of a hinge 3a. When a releasing part 3c hits a stopper 27, the turn is stopped. The upper lid holding member 22 no longer moves upward, and substrates can be taken in or out. Consequently, the mechanism can be simplified, and production yield can be improved with reduced amount of dust rising from the mechanism.</p> |
