| 摘要 |
<p>PURPOSE:To provide a wafer supporting silicon boat having much improved accuracy in size, good repeatability in usage without reducing yield, and impurity-preventive structure, in which impurities hardly adhere to its parts and even when the impurity adheres, it is easily removed. CONSTITUTION:A wafer supporting silicon boat comprises a holding rod 2 with a plurality of holding grooves 5 for holding a semiconductor wafer 6, and at least two fixing plates 1a and 1b for fixing the holding rod 2. A silicon film 8 is formed on an exposed part at a bonded part between the holding rod 2 and the fixing plates 1a and 1b.</p> |
