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发明名称
SEMICONDUCTOR INTEGRATED CIRCUIT
摘要
申请公布号
JPH05175430(A)
申请公布日期
1993.07.13
申请号
JP19910341408
申请日期
1991.12.24
申请人
NEC CORP
发明人
FUTAMI HARUJI
分类号
H01L21/02;H01L21/66;H01L21/82;H01L21/822;H01L23/00;H01L27/04
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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