| 摘要 |
PURPOSE:To enable to store a lot of masks for semiconductor exposure in a limited space and improve the handleability in loading, storage and unloading. CONSTITUTION:A mask case 20 is provided with projections 11 which are placed on a storage rack 21 and ensure transferability. Between a mask case and the storage rack are provided rack locking means 21B and 11A which secure a mask case on the storage rack and ensure transferability. Between a mask case and a mask case handier 23, provided are engaging portions JIB and 23A through which the mask case handler 23 draws a mask case 20 frontward. A lid locking means is provided between a mask case and the lid thereof. In addition, the mask case handler is provided with a means for releasing this lid locking means when a mask case is drawn frontward. Between a mask case lid 4 and the mask case handier, lid opening means 25 and 4A are provided so that the mask lid, when drawn frontward, will be opened and the mask handler will hold a mask in the case with the lid open and take it out thereof. |
